Ceramic Coating ESC
Sintered Ceramic Plate ESC
Cryogenic Chiller
Channel 1(Cold) |
Channel 2(Hot) |
Channel 3(Top) |
|
---|---|---|---|
Temp. Range(℃) |
-100 ~ +30 |
30 ~ +60 |
30 ~ +80 |
Temp. Stability(℃) |
±0.2 |
||
Cooling Capacity (KW) |
4@-100℃ |
6@30℃ |
6@30℃ |
Pump Capacity(LPM) |
25@0.7MPa@-100℃ |
25@0.7MPa@30℃ |
25@0.7MPa@30℃ |
Heater Capacity(KW) |
4 |
6 |
6 |
Fluid |
Engineered Fluid |
Engineered Fluid |
Fluorinert |
PCW(LPM) |
50@20±2℃@0.5MPa |
15@20±2℃@0.5MPa |
15@20±2℃@0.5MPa |
Type |
Three stage cascade refrigerating cycle |
Heat Exchanger |
Heat Exchanger |
CDA(LPM) |
100@0.5MPa@DP -60℃ |
||
Electric Power |
3P, 220V, 200A, 60Hz |
||
Dimension(mm) |
W1010 x D1750 x H1814, 820kg |
생산설비
설계에서 성능검사까지 사내에서 모두 완성 가능합니다.