MCA Heater Refurbishments
Before
After
1
Unique Diamond material is used to replace OEM material (TiN), and rebuild surfaces
2
Improved electrical and mechanical performance
3
Qualified in major Taiwan foundry 25+ chambers over 2 years, still within specs
AMAT ENDURA 300MM UPGRADES, REPAIRS
|
MCA ESC upgrade for longer lifetime
|
|
|
|
|
|
|
|
|
|
|