TECHNOLOGY

Coating Type ESC
Coating Type ESC
Plate Type ESC
Cryogenic
생산설비

Ceramic Coating ESC

  • 1
    Ceramic Dielectric Layer
    • · High density ceramic direct coating.
    • · Many ceramic materials for any purpose.
    • · He pattern (Groove, Mesa)
    • · Full, Half refurbishments
  • 2
    Embedded Electrode
    • · Non-organic contents include
    • · High efficiency chucking force
  • 3
    Isolation layer
    • · High density ceramic coating
    • · Very high break down voltage
  • 4
    Frame
    • · Customization (He, Coolant)
    • · Low CTE frame for cryogenic ESC.

Sintered Ceramic Plate ESC

  • 1
    Plate
    • · 99.99% Purity alumina ceramic
    • · Ultra high breakdown voltage :
      >100kV.mm
    • · Small grains size, High density
  • 2
    Glue
    • · Wide temp range :
      -100℃ ~ +80 ℃
    • · Thermal conductivity :
      0.2 ~ 3.0W/m*K
  • 3
    Protection Layer
    • · Glue side wall protection from
      lateral plasma attack
    • · Thermal conductivity :
      0.2 ~ 7W/m*K
  • 4
    Frame
    • · All new design for customer
    • · Lower CTE frame for cryogenic ESC.

Cryogenic MMC

Low temperature MMC Frame (Muli-material composites)

Metal Frame

Current

Temnest -MMC

Thermal Expansion
(um/m.0C)

24

7.0 ~ 15.0

7.97 - Ceramic Plate

Material

Al 6061

Aluminum +

Thermal Conductivity
(W.m-1.K-1)

190~210

187~196.1

Same or similar Thermal Expansion Frame material with Ceramic Plate




Cryogenic Chiller

Channel 1(Cold)

Channel 2(Hot)

Channel 3(Top)

Temp. Range(℃)

-100 ~ +30

30 ~ +60

30 ~ +80

Temp. Stability(℃)

±0.2

Cooling Capacity (KW)

4@-100℃

6@30℃

6@30℃

Pump Capacity(LPM)

25@0.7MPa@-100℃

25@0.7MPa@30℃

25@0.7MPa@30℃

Heater Capacity(KW)

4

6

6

Fluid

Engineered Fluid

Engineered Fluid

Fluorinert

PCW(LPM)

50@20±2℃@0.5MPa

15@20±2℃@0.5MPa

15@20±2℃@0.5MPa

Type

Three stage cascade refrigerating cycle

Heat Exchanger

Heat Exchanger

CDA(LPM)

100@0.5MPa@DP -60℃

Electric Power

3P, 220V, 200A, 60Hz

Dimension(mm)

W1010 x D1750 x H1814, 820kg

생산설비

설계에서 성능검사까지 사내에서 모두 완성 가능합니다.